Automated Nanometrology & Characterization for Industrial Environments
Product Overview
The Dimension FastScan Pro is the industry’s leading automated atomic force microscope (AFM) for high-speed, high-resolution metrology in production and research environments. Engineered for the demands of QA/QC, failure analysis (FA), and process control, FastScan Pro combines PeakForce Tapping® with FastScan™ technology to deliver unmatched throughput, consistency, and imaging performance—without compromising on ease of use.
From soft polymers to ultra-hard substrates, FastScan Pro provides repeatable, quantitative topography, mechanical, and electrical property measurements across a wide range of materials and applications. Integrated with powerful AutoMET™ automation software, it supports 24/7 operation for reliable and cost-effective nanoscale characterization.
Key Features
- PeakForce Tapping® for ultra-low imaging forces, preserving delicate samples and ensuring tip longevity
- FastScan™ high-bandwidth technology enables 10× faster scan rates without sacrificing resolution
- AutoMET™ software for fully automated, recipe-driven metrology workflows
- ScanAsyst® and NanoScope® interfaces for operator-friendly scanning and navigation
- Quantitative Property Mapping with PeakForce QNM® and FastForce Volume™
- Fast nanoelectrical analysis with Conductive-AFM, PeakForce TUNA™, and KPFM™
- Integrated platform designed for high-throughput metrology in semiconductor, data storage, polymer, and LED industries
Specifications
| Feature | Specification |
|---|---|
| Scan Range (XY) | 90 µm × 90 µm (Icon head) / 35 µm × 35 µm (FastScan head) |
| Z Range | 10 µm (Icon) / ≥3 µm (FastScan) |
| Noise Floor (Z) | <35 pm RMS (Icon) / <55 pm RMS (FastScan) |
| XY Position Noise | ≤0.15 nm RMS (Icon) / ≤0.20 nm RMS (FastScan) |
| Sample Size | Up to 200 mm standard, optional 300 mm vacuum chuck |
| Positioning Stage | Motorized 200 mm × 200 mm with ±2 µm bidirectional accuracy |
| Imaging Modes | Tapping, PeakForce Tapping, Phase, Contact, QNM, MFM, EFM, CAFM, KPFM |
| Automation Software | AutoMET™ with recipe editor, tip/sample alignment, pattern recognition |
| Optics | 5MP digital camera, 130–1465 µm viewing area, motorized focus |
| Controller/Software | NanoScope V with NanoScope v9.1+ |
| Certifications | CE and UKCA Compliant |
Applications
Semiconductors
- High-accuracy step height and trench depth metrology
- Nanometer-node device characterization and fault isolation
- Wafer roughness and defect mapping across 200–300 mm wafers
MEMS Manufacturing
- 3D mechanical characterization of actuators and sensors
- Nanomechanical property and displacement measurements
- MEMS device failure and stress analysis
High-Brightness LEDs & Solar Materials
- Patterned sapphire substrate (PSS) depth/shape metrology
- Roughness analysis of HB-LED substrates
- Electrical property mapping of solar cell layers
Polymers & Thin Films
- Topography and modulus mapping of copolymers and composites
- Quality control of thickness and surface uniformity
- Simultaneous mechanical and electrical mapping
Data Storage
- Slider and media topography with sub-nm repeatability
- Electrical and magnetic property failure analysis
- High-throughput media defect detection
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