inLux SEM Raman Interface

Product Overview

The inLux SEM Raman Interface transforms your scanning electron microscope (SEM) into a powerful, multimodal analytical system. By seamlessly combining high-resolution SEM imaging with in-situ Raman spectroscopy, photoluminescence (PL), and cathodoluminescence (CL), the inLux interface provides unparalleled chemical, structural, and morphological insights — all without moving your sample.

Designed to be retrofitted to a wide range of SEM models, the inLux interface enables simultaneous, co-localized SEM and Raman measurements, drastically simplifying workflows and eliminating risks of sample misalignment, damage, or contamination. It revolutionizes advanced materials characterization in fields ranging from geology and semiconductors to energy research and pharmaceuticals.

Key Features

• Simultaneous SEM and Raman Data Acquisition: Collect correlated chemical, vibrational, structural, and topographical data without removing your sample.
• Fully Integrated Probe Design: The parabolic mirror and electron beam aperture enable perfect co-localization of the laser and electron beam.
• Real-Time Correlated Imaging: Instantly overlay Raman chemical maps with SEM topography and EDS elemental maps using Renishaw’s Correlate™ software.
• High-Precision Mapping: Collect 2D and 3D Raman data with 50 nm encoded positional accuracy.
• Multi-Modal Capability: Perform Raman, PL, CL, SEM imaging, and EDS analysis seamlessly.
• Flexible Laser Configuration: Supports up to two laser excitation wavelengths (405–785 nm) and optional CL modules.
• Safe, Non-Invasive Operation: Retractable probe design avoids interference with existing SEM accessories.
• Retrofit Compatibility: Fits onto most SEM systems without needing modifications to the microscope.

Specifications

Applications

Academia & Research Institutions

• Advanced materials characterization combining chemical and morphological data
• Study of biological tissues, biomaterials, and nanomaterials under SEM
• Real-time multimodal imaging workflows for teaching and high-impact research

Semiconductor Industry

• Quality control and defect analysis of wafers and microelectronic components
• Stress and strain mapping in GaN, GaAs, Si, and heterostructures
• Co-localized chemical, structural, and electronic analysis of thin films

Electronics & Photonics

• Investigation of photonic materials using combined CL, Raman, and SEM analysis
• Failure analysis of semiconductor devices, MEMS, and flexible electronics
• Mapping of doping variations, carrier lifetimes, and strain in optoelectronic materials

Energy Storage & Battery Research

• Analysis of cathode/anode material phases in lithium-ion batteries
• Mapping carbon crystallinity, amorphous regions, and silicon distribution
• Complementary EDS, Raman, and SEM analysis of composite electrode layers

Pharmaceuticals

• Mapping of active pharmaceutical ingredient (API) distributions within tablets
• Detection of contaminants and polymorphic forms using Raman microscopy
• SEM morphology analysis of drug delivery systems (nanoparticles, coatings)

Forensics & Art Conservation

• Identification of trace evidence through simultaneous chemical and morphological mapping
• Differentiation of pigments, polymers, and degraded materials in forensic samples
• Non-invasive characterization of artworks and archaeological samples

Industrial Manufacturing

• Process control and quality assurance by mapping chemical variations and structural defects
• Detection and analysis of contamination in high-precision manufacturing components