MICRO Robotics Solutions for Optical Microscopes
Product Overview
The MICRO series is a compact, turnkey microprobing solution designed for electrical characterization of micron and sub-micron scale components in semiconductors, MEMS, optoelectronics, and material science applications.
The MP4-MIC-MAN-K1 Microprobing Platform integrates a high-resolution optical microscope, manual sample stage, and up to 4 miBot nanomanipulators, providing precise, real-time control of probe tips for accurate measurements. Its plug-and-play design ensures easy setup and intuitive operation, making it an ideal tool for researchers and engineers working on microelectronics and material characterization.
Key Features
- Turnkey Microprobing System – Includes microscope, sample stage, and source-measure unit for complete electrical testing.
- High-Precision miBot™ Manipulators – Up to 4 motorized nanoprobers with 100nm positioning resolution.
- Manual XY Sample Stage – 10mm x 10mm travel range with 0.5mm/rev resolution for precise sample positioning.
- High-Resolution Optical Imaging – 1.1μm resolution, motorized zoom (2.8x - 35.5x magnification), and adjustable LED illumination.
- Compact & Portable Design – Lightweight and easy to move, saving valuable lab space.
- Safe, Reliable Probing – Piezo-actuated positioning ensures stable electrical contact without damaging samples.
- Swiss-Engineered Quality – Designed and manufactured in Switzerland, ensuring high precision and durability.
- User-Friendly Software – Precisio™ software provides a step-by-step guided workflow for accurate probe positioning and measurement acquisition.
Specifications
| Feature | Specification |
|---|---|
| Microscope Resolution | 1.1μm optical resolution |
| Magnification Range | 2.8x to 35.5x (motorized zoom) |
| Working Distance | 33.5mm |
| Camera | 1920 x 1200 pixels, USB 3.0, pixel size: 5.86μm |
| Illumination | Coaxial LED with adjustable intensity |
| Focus Adjustment | Sub-micron screw, 28mm range |
| Sample Stage | Manual XY positioning, 10mm x 10mm travel, 0.5mm/rev resolution |
| Sample Size Compatibility | Up to 100mm (4-inch wafers) |
| Electrical Probing Interface | 4 coaxial (BNC) connectors |
| Voltage Range | ±100V |
| Current Range | 1pA – 100mA |
| Resistance | Approx. 3.5Ω (from probe tip to BNC connectors) |
| Motorized miBot™ Probes | Up to 4 independent probes with 4-axis control (X, Y, R, Z) |
| Motion Resolution | 100nm (MICRO configuration, upgradeable to 0.02nm) |
| Compatible Probe Tips | 0.51mm shank diameter, 5nm - 10μm tip radius |
| Software Interface | Precisio™ software with microscopy module (Windows OS) |
| System Dimensions | 400mm (W) x 346mm (D) x 662mm (H) |
Applications
- Semiconductor Device Characterization – I-V curve measurements, SRAM bit-cell testing, transistor/diode analysis.
- MEMS & Microsensors Testing – Actuation and qualification of microelectromechanical devices.
- Optoelectronic & Photonic Device Testing – MicroLEDs, solar cells, nanowires, and optical sensors characterization.
- Material Science & Nanotechnology – Thin-film resistivity measurements, micro/nano-assembly, and nanowire analysis.
- Bioelectronics Research – Electrical characterization of bioelectronic interfaces and biosensors.
- Failure Analysis & Reverse Engineering – Microelectronic defect detection and chip security assessment.
Resources
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