Imina Technologies NANO Robotics Solutions for Electron Microscopes
Product Overview
The NANO series provides high-precision nanomanipulation and nanoprobing solutions for scanning electron microscopes (SEM) and focused ion beam (FIB) systems. Designed for failure analysis, semiconductor characterization, and in-situ electrical probing, the NANO series enables precise sample manipulation at the nanometer scale.
The core of the NANO system is the miBot™ nanomanipulator, the world’s most compact and mobile robot with 4 degrees of freedom and nanometer positioning resolution. Unlike traditional manipulators, miBot™ is untethered, allowing free movement over the sample stage for precise, real-time adjustments.
Key Features
- miBot™ Nanomanipulators – Up to 8 independent nanoprobers with high-resolution piezoelectric control.
- Mobile & Untethered – Unlike fixed-stage manipulators, miBot™ moves freely, allowing rapid repositioning.
- High-Precision Motion – Stepping resolution down to 60nm and fine scanning resolution below 1nm.
- SEM & FIB Compatibility – Fully integrates with electron microscopes, enabling in-situ semiconductor failure analysis.
- Precisio™ Software Suite – Step-by-step guidance, data acquisition, and measurement automation.
- Short Working Distance Operation – Works at distances as low as 2mm, compatible with low accelerating voltages.
- EBIC/EBAC Analysis – Enables defect localization, resistance mapping, and electronic failure diagnostics.
- Flexible Configurations – Available in stage-mounted (SM) or load-lock (LL) platforms, with options for thermal control and large-sample adaptation.
- Fast Installation & Removal – No permanent chamber modifications required—setup in minutes.
- Optional Electrical Measurement Modules – Supports I-V curve tracing, MEMS actuation, and optoelectronic testing.
Specifications
| Feature | Specification |
|---|---|
| Motion Degrees of Freedom | 4-axis (X, Y, Z, R) independent piezoelectric motion |
| Stepping Resolution (Coarse Positioning) | 60nm (X,Y), 120nm (Z) |
| Scanning Resolution (Fine Positioning) | <1nm (X,Y), 0.1nm (Z) |
| Travel Range | 20mm x 20mm (X,Y), ±180° rotation, 41° tilt |
| Speed | Up to 1.5mm/s (X,Y), 150mrad/s (Z) |
| Platform Types | Stage-mounted (SM100, SM125) or Load-lock (LL10, LL11) |
| Number of miBots™ per System | Up to 8 independent nanoprobers |
| Sample Size Compatibility | 25mm to 50mm (1” to 2”) |
| <SEM Compatibility | Compatible with most commercial SEM & FIB systems |
| Working Distance | As low as 2mm (compatible with low-kV imaging) |
| Tilt Capability | Up to 55° for FIB & in-situ circuit editing |
| Voltage Range | ±100V |
| Max Current | 100mA |
| Leakage Current | <100fA/V |
| Operating Pressure | 10⁻⁸ mbar (vacuum compatible) |
| Temperature Control (Optional) | -30°C to 150°C (with thermal stage upgrade) |
Applications
- Semiconductor Device Characterization –I-V curve measurements, SRAM bit-cell analysis, and resistivity mapping.
- Failure Analysis & Defect Localization – EBIC/EBAC mapping to pinpoint defects in semiconductor structures.
- MEMS & Sensor Testing – Actuation and qualification of microelectromechanical systems.
- Optoelectronics & Material Science – Nanowire, graphene, thin-film, and solar cell electrical testing.
- Reverse Engineering & Security Analysis – Probing integrated circuits for security assessments and chip design analysis.
- In-Situ Circuit Editing – Simultaneous FIB modifications and nanoprobing for accelerated failure analysis.
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