High-Performance Analytical SEM

Tescan Vega SEM

Product Overview

The VEGA is a Analytical Scanning Electron Microscope (SEM) with a tungsten electron source, offering high-resolution imaging and live elemental analysis in a single system. Designed for routine materials characterization, research, and quality control, VEGA seamlessly integrates SEM imaging and Essence™ EDS analysis into a user-friendly platform, ensuring fast, precise, and efficient materials inspection.

With Wide Field Optics™, MultiVac variable pressure mode, and In-Flight Beam Tracing™ technology, the VEGA SEM delivers sharp imaging, accurate elemental composition analysis, and excellent depth of focus, making it an ideal solution for metallurgy, semiconductors, electronics, life sciences, and geological research.

 

Key Features

  • Integrated SEM & EDS in Live View – Simultaneously capture SEM images and perform real-time elemental analysis with Essence™ EDS.
  • Tungsten Electron Source – Delivers high-quality imaging for a wide range of material types.
  • Wide Field Optics™ for Precision Navigation – Begin observation at ultra-low magnifications (2×) with an intuitive live SEM overview.
  • In-Flight Beam Tracing™ Technology – Ensures optimal imaging and analytical conditions with seamless beam adjustments.
  • MultiVac Mode for Low-Vacuum Imaging – Supports imaging of insulating, beam-sensitive, and outgassing materials.
  • ONCam Optical Navigation & Correlation Camera – True-color image navigation for large samples and precise targeting.
  • 4Q BSE Detector with Compositional & Topographical Imaging – Flexible quadrant selection for material contrast enhancement.
  • Essence™ 3D Collision Model – Prevents detector and sample collisions by simulating chamber movements in real time.
  • Depth Mode for Enhanced Focus – Ensures deep focus on samples with extreme topography.
  • User-Friendly Essence™ Software – Modular, intuitive interface for all experience levels with quick-search functions and workflow customization.

 

Specifications

Feature Specification
Electron Source Heated Tungsten Filament
Electron Optics Wide Field Optics™ with Intermediate Lens™ & In-Flight Beam Tracing™
Resolution High Vacuum Mode: 3 nm at 30 keV / 8 nm at 3 keV Low Vacuum Mode: 3.5 nm at 30 keV with BSE detector
Maximum Field of View >50 mm
Detectors SE, BSE (4Q BSE with COMPO & TOPO modes), EDS (optional), Gaseous SE (optional)
Variable Pressure Mode SingleVac (Standard) & MultiVac (Optional, up to 500 Pa)
Imaging Modes Brightfield, Darkfield, Topographic, Material Contrast, Depth Mode
EDS Analysis Integrated Essence™ EDS for live elemental mapping & spectra acquisition
Optical Navigation System ONCam (True-Color, LED Lighting, SEM Overlay Support)
Software Essence™ Platform with Workflow Customization & 3D Collision Model
Chamber Size Large volume with support for multiple detectors & accessories
Operating Environment Cleanroom-Compatible, Low Noise Requirements

 

Applications

  • Microstructure & Phase Analysis – Study grain morphology, phase distribution, and porosity.
  • Failure Analysis & Quality Control – Identify cracks, contamination, and defects in metal samples.
  • Additive Manufacturing & Metal Foams – Evaluate grain structure and composition of 3D-printed metal parts.
  • Wafer & IC Chip Inspection – Detect defects in microelectronics, photomasks, and semiconductor layers.
  • PCB & Solder Joint Analysis – Analyze solder ball integrity, wire bonding, and corrosion in circuits.
  • Thin Film & Coating Characterization – Measure thickness and uniformity of deposited materials.
  • Mineral & Rock Composition Analysis – High-contrast BSE imaging for petrographic and crystallographic studies.
  • Cathodoluminescence Imaging – Reveal structural variations in geological samples.
  • Fossil & Microfossil Analysis – Examine ancient biological remains with high detail.
  • Biological Sample Imaging – Observe cell structures, bacteria, and biomaterials without charging artifacts.
  • Cryo-SEM for Hydrated Samples – Preserve soft materials and study moisture-sensitive structures.
  • Tissue Engineering & Medical Devices – Analyze scaffolds, coatings, and prosthetic materials.
  • Ceramics & Polymers – Evaluate composite material structures and detect manufacturing defects.
  • Coatings & Surface Analysis – Measure adhesion, uniformity, and layer composition.
  • Battery & Energy Storage Materials – Study lithium-ion battery electrodes and electrolyte interactions.
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